簡吉鴻

磁控濺鍍法製備氧化矽、氧化鋯與矽酸鋯薄膜及其性質之研究 = = Silica、zirconia and zirconium silicate thin films prepared by magnetron sputtering / by: 簡吉鴻; 郭東昊 (Language materials, printed)