atomic force microscopy lithography
概要
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書目資訊
原子力顯微鏡探針陽極氧化二氣化矽與應用 = = Atomic force microscopy tip-induced anodic oxidation on SiO2 and its applications /
by:
林世峰; atomic force microscopy lithography; film; nano-scale; pattern transfer; sio2; tip-induced local anodic oxidation; 翁若敏; 馬遠榮
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