電漿
Overview
Works: | 13 works in 1 publications in 1 languages |
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Titles
電容式電漿源對高頻響應的模擬分析 = = Simulation of high frequency response on capacitive plasma source /
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雙頻觸發電容式電漿源特殊性模擬與分析 = = simulation and characteristic analysis of a dual frequency capacitive plasma source /
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雙頻磁化加強型電容式電漿特性 = = Magnetically Enhanced Dual Frequency Capacitive Discharge /
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