Microelectromechanical systems.

Mechanics of microelectromechanical systems by: (Language materials, printed)

RF MEMS circuit design for wireless communications by: (Language materials, printed)

Electroceramic-Based MEMS = Fabrication-Technology and Applications / by: (Language materials, printed)

Principles and Applications of NanoMEMS Physics by: (Language materials, printed)

Integrated Chemical Microsensor Systems in CMOS Technology by: (Language materials, printed)

Mechanics of Microelectromechanical Systems by: (Language materials, printed)

BioNanoFluidic MEMS by: (Language materials, printed)

Smart Devices and Machines for Advanced Manufacturing by: (Language materials, printed)

Analysis and design principles of MEMS devices by: (Language materials, printed)

Photonic microsystems = micro and nanotechnology applied to optical devices and systems / by: (Language materials, printed)

Piezoelectric-based vibration-control = from macro to micro/nano scale systems / by: (Language materials, printed)

Mechatronic systems = fundamentals / by: (Language materials, printed)

Neural networks and micromechanics by: (Language materials, printed)

Introductory MEMS = fabrication and applications / by: (Language materials, printed)

Radioisotope thin-film powered microsystems by: (Language materials, printed)

Low-power crystal and MEMS oscillators = the experience of watch developments / by: (Language materials, printed)

Handbook of silicon based MEMS = materials & technologies / by: (Electronic resources)

Micromixers = fundamentals, design and fabrication / by: (Electronic resources)

MEMS materials and processes handbook by: (Electronic resources)

MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications by: (Electronic resources)

Micro-drops and digital microfluidics by: (Electronic resources)

Sensors for mechatronics by: (Electronic resources)

Micromixers DUP_1 = fundamentals, design, and fabrication / by: (Electronic resources)

Adhesion aspects in MEMS-NEMS by: (Electronic resources)

Poly-SiGe for MEMS-above-CMOS sensors by: (Electronic resources)

Lab-on-a-chip devices and micro-total analysis systems = a practical guide / by: (Electronic resources)

MEMS for automotive and aerospace applications by: (Electronic resources)

Handbook of silicon based MEMS materials and technologies by: (Electronic resources)

Micro- and nanosystems for biotechnology / by: (Language materials, printed)

Advanced microsystems for automotive applications 2016 = smart systems for the automobile of the future / by: (Electronic resources)

Piezoelectric MEMS resonators by: (Electronic resources)

Outlook and challenges of nano devices, sensors, and MEMS by: (Electronic resources)

Wireless MEMS networks and applications / by: (Electronic resources)

Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / by: (Electronic resources)

Piezoresistive effect of p-type single crystalline 3C-SiC = silicon carbide mechanical sensors for harsh environments / by: (Electronic resources)

Mechanics of microsystems by: (Electronic resources)

Micro electro mechanical systems by: (Electronic resources)

MEMS packaging by: (Electronic resources)

Sensors for mechatronics / by: (Electronic resources)

Toward inertial-navigation-on-chip = the physics and performance scaling of multi-degree-of-freedom resonant MEMS gyroscopes / by: (Electronic resources)

MEMS = field models and optimal design / by: (Electronic resources)

Reliability of high-power mechatronic systems 1 = aerospace and automotive applications : simulation, modeling and optimization / by: (Electronic resources)

Reliability of high-power mechatronic systems 2 = aerospace and automotive applications : issues, testing and analysis / by: (Electronic resources)

Levitation micro-systems = applications to sensors and actuators / by: (Electronic resources)

MEMS product development = from concept to commercialization / by: (Electronic resources)

Case studies in micromechatronics = from systems to processes / by: (Electronic resources)

Design and Implementation of Solid/Solid Phononic Crystal Structures in Lateral Extensional Thin-Film Piezoelectric on Silicon Micromechanical Resonators. by: (Electronic resources)

Solid acoustic waves and vibration : = theory and applications / by: (Language materials, printed)

Advanced mems/nems fabrication and sensors by: (Electronic resources)

Micromachined circuits and devices = microwave to sub-millimeter applications / by: (Electronic resources)

MEMS and microfluidics in healthcare = devices and applications perspectives / by: (Electronic resources)

Advanced MEMS packaging by: (Electronic resources)

Dual-mass linear vibration silicon-based MEMS gyroscope by: (Electronic resources)

Photonic microresonator research and applications by: (Language materials, printed)

Feedback control of MEMS to atoms by: (Electronic resources)

Biomaterials for MEMS by: (Electronic resources)

MEMS product engineering = handling the diversity of an emerging technology. Best Practices for Cooperative Development / by: (Electronic resources)

Micro and nano fabrication = tools and processes / by: (Electronic resources)

Introduction to micromechanisms and microactuators by: (Electronic resources)

Advanced mechatronics and MEMS devices.. II by: (Electronic resources)

Self-powered and soft polymer MEMS/NEMS devices by: (Electronic resources)

Process variations in microsystems manufacturing by: (Electronic resources)

Whole-angle MEMs gyroscopes = challenges and opportunities / by: (Electronic resources)

Novel Methods of Organic Electrochemical Device Nanofabrication and Characterization. by: (Electronic resources)