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Ion implantation : = basics to devic...
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Rimini, E.
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Ion implantation : = basics to device fabrication /
紀錄類型:
書目-語言資料,印刷品 : Monograph/item
正題名/作者:
Ion implantation :/ by Emanuele Rimini.
其他題名:
basics to device fabrication /
作者:
Rimini, E.
出版者:
Boston :Kluwer Academic Publishers, : c1995.,
面頁冊數:
xii, 393 p. :ill. ;25 cm.
標題:
Ion implantation. -
ISBN:
0792395204 (acid-free paper)
Ion implantation : = basics to device fabrication /
Rimini, E.
Ion implantation :
basics to device fabrication /by Emanuele Rimini. - Boston :Kluwer Academic Publishers,c1995. - xii, 393 p. :ill. ;25 cm. - The Kluwer international series in engineering and computer science ;SECS 293.. - Kluwer international series in engineering and computer science ;SECS 293..
Includes bibliographical references (p. [359]-378) and index.
ISBN: 0792395204 (acid-free paper)
LCCN: 94034251 //r94Subjects--Topical Terms:
650251
Ion implantation.
LC Class. No.: QC702.7.I55 / R56 1995
Dewey Class. No.: 621.3815/2
Ion implantation : = basics to device fabrication /
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