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Fundamental electron interactions wi...

~

Olthoff, James Kenneth, (1958-.)

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Fundamental electron interactions with plasma processing gases /

紀錄類型:	書目-語言資料,印刷品 : Monograph/item
正題名/作者:	Fundamental electron interactions with plasma processing gases / / Loucas G. Christophorou and James K. Olthoff.
作者:	Christophorou, L. G.
其他作者:	Olthoff, James Kenneth,
出版者:	New York :Kluwer Academic/Plenum Publishers, : c2004.,
面頁冊數:	xii, 776 p. :ill. ;26 cm.
叢書名:	Physics of atoms and molecules.
標題:	Electron-molecule collisions. -
ISBN:	0306480379 (hbk.) :

Fundamental electron interactions with plasma processing gases /
Christophorou, L. G.

Fundamental electron interactions with plasma processing gases / Loucas G. Christophorou and James K. Olthoff. - New York :Kluwer Academic/Plenum Publishers,c2004. - xii, 776 p. :ill. ;26 cm. - Physics of atoms and molecules..

Includes bibliographical references and index.

ISBN: 0306480379 (hbk.) :NT1300.00

LCCN: 2003064029Subjects--Topical Terms:

751659
Electron-molecule collisions.

LC Class. No.: QC794.6.C6 / C48 2004

Dewey Class. No.: 539.7/57

Fundamental electron interactions with plasma processing gases /
LDR:00619pam a2200181 a 45 001 698916
005 20051229
008 051229s2004 nyua b 001 0 eng
010 $a 2003064029
020 $a 0306480379 (hbk.) : $c NT1300.00
035 $a PS94T0019
040 $a DLC $c DLC $d DLC
050 0 0 $a QC794.6.C6 $b C48 2004
082 0 0 $a 539.7/57 $2 22
100 $a Christophorou, L. G. $3 751658
245 1 0 $a Fundamental electron interactions with plasma processing gases / $c Loucas G. Christophorou and James K. Olthoff.
260 $a New York : $c c2004. $b Kluwer Academic/Plenum Publishers,
300 $a xii, 776 p. : $b ill. ; $c 26 cm.
440 0 $a Physics of atoms and molecules.
504 $a Includes bibliographical references and index.
650 $a Electron-molecule collisions. $3 751659
650 $a Plasma (Ionized gases). $3 674298
700 $a Olthoff, James Kenneth, $d 1958-. $3 751657

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